A typical product manufactured using micromachining technology is a silicon micro pressure sensor, which has formed an industry in Japan and Europe. Silicon micro pressure sensors have developed rapidly in recent years, and the sensors are mainly used in the automotive industry and healthcare .
The silicon micro pressure sensor is characterized by small size, light weight, no moving parts, high reliability, and large-scale production of the sensor, so the cost is low. High reliability and low cost are very suitable for the requirements of the automotive industry, so it has rapidly expanded its application field in the automotive industry. Such as the brake surface pressure of the automatic brake system, tire pressure, airbag pressure, transmission system fluid pressure, injection system fluid pressure, injection fuel pressure, engine oil pressure. The intake manifold pressure has a place for silicon micro pressure sensors.
LUCASNOVASENSOR has even developed a pressure sensor that can be directly embedded in the tire using micromachining technology. It alerts the driver when the car's tire pressure is low or the tire is running. The world's cars produce tens of millions of vehicles a year, so this is a very promising market.
The largest application of silicon miniature pressure sensors in the healthcare sector is blood pressure monitors. It is said that some large medical machinery manufacturing uses nearly 5 million pressure sensors per year. In addition, silicone micro-pressure sensors for monitoring uterine pressure during dysuria in women, and sensors for intravenously monitoring the flow of medicinal fluids have a considerable amount of market demand. Many other healthcare applications are also being developed.
Silicon micro pressure sensors are basically divided into two categories: capacitive and piezoresistive. The capacitive pressure sensor includes a film which acts as a plate of a variable air capacitor. When the film is under pressure, the film is displaced to change the capacitance value. With this change, the pressure can be obtained through the corresponding circuit processing. value. Piezoresistive sensors are made using the principle that the silicon material will undergo a change in resistance when subjected to pressure. Generally, the strain resistance of four silicon materials constitutes a Wheatstone bridge to measure the pressure.
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